GA062 - Outgas released from LSI Materials

Butylated hydroxytoluene(BHT)
Di(2-ethylhexyl)phthalate
Diethyl phthalate (DEP)
Di-n-butyl phthalate
Di(2-ethylhexyl)adipate(DOA)
Di-n-butyl adipate (DBA)
Dodecamethyl cyclohexasiloxane
Tri-n-butyl phosphate
Triphenyl phosphate
Tris(2-chloroethyl)phosphate

clean room
semiconductor
atmosphere
SVOC
plasticizer
flame retardant
antioxidant
outgassing
InertCap 1MS